Equipment Engineering System: EES



Product quality resides at the top of the quality factor hierarchy, a pyramid based on several layers of supporting factors such as operation results, process recipes and equipment configuration. EES solidifies all layers of this hierarchy to achieve a higher level of yield loss prevention and cost savings than the other traditional methods.


Factor Measurement
Product Quality   Product Test  
Operation      In-line Inspection 
   Results   PHD,PSD,SDV  
  Process Recipe     PRM, ARS  
Equipment Configuration   ECM  
SECS Port Multiplexer   MPX  
  : EES module functions

Figure. Quality Factor Hierarchy

The primary functional modules of the EES are Process Summary Data (PSD), Process History Data (PHD), Process Recipe Monitoring (PRM), Auto Recipe Selection (ARS) and Equipment Configuration Monitoring (ECM). Users find EES easy to use, with no need for time-consuming operation training or complicated operations. Customized functions are also available and provided per customer request.


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