Equipment Engineering System: EES
Product quality resides at the top of the quality factor hierarchy, a pyramid based on several layers of supporting factors such as operation results, process recipes and equipment configuration. EES solidifies all layers of this hierarchy to achieve a higher level of yield loss prevention and cost savings than the other traditional methods.
| Factor | Measurement |
| Product Quality | Product Test |
| Operation | In-line Inspection |
| Results | PHD,PSD,SDV |
| Process Recipe | PRM, ARS |
| Equipment Configuration | ECM |
| SECS Port Multiplexer | MPX |
| : EES module functions |
Figure. Quality Factor Hierarchy
The primary functional modules of the EES are Process Summary Data (PSD), Process History Data (PHD), Process Recipe Monitoring (PRM), Auto Recipe Selection (ARS) and Equipment Configuration Monitoring (ECM). Users find EES easy to use, with no need for time-consuming operation training or complicated operations. Customized functions are also available and provided per customer request.
Product Brochure